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| Integrated structure-motion-control modeling for rigid-flexible coupling positioning stage |
| Received:March 29, 2022 Revised:July 12, 2022 |
| View Full Text View/Add Comment Download reader |
| DOI：10.7511/jslx20220329002 |
| KeyWord:RFCPS dynamics structural design motion planning control system |
| Author | Institution |
| 邓毅 |
桂林师范高等专科学校 物理与工程技术系, 桂林 |
| 陈旭 |
桂林师范高等专科学校 物理与工程技术系, 桂林 |
| 黄平 |
桂林师范高等专科学校 物理与工程技术系, 桂林 |
| 段明磊 |
广西大学 机械工程学院, 南宁 |
| 黄观新 |
广东工业大学 省部共建精密电子制造技术与装备国家重点实验室, 广州 |
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| Abstract: |
| Aiming at the problem of long stroke and high precision positioning in microelectronics manufacturing industry, a rigid-flexible coupling positioning stage (RFCPS) was proposed, and its integrated structure-motion-control dynamics simulation model was established.Firstly, the floating frame of reference formulation is modified according to the structural characteristics of RFCPS, and a simple and efficient dynamic simulation model is established.Secondly, By combining the dynamic simulation model, the third-order S-shaped curve and the classical PID control method, an integrated structure-motion-control simulation model is established.Finally, the effectiveness of the simulation model is verified by means of numerical examples.The numerical simulation results show that the integrated structure-motion-control simulation model can effectively simulate the working process of the positioning stage, creating conditions for the subsequent structural optimization, motion planning, control system design and other work. |
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