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| Meniscus and viscous forces between rough contact surfaces in micro/nano-devices |
| Received:March 14, 2013 Revised:April 10, 2014 |
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| DOI：10.7511/jslx201404019 |
| KeyWord:micro/nano-element rough surface contact model meniscus force viscous force |
| Author | Institution |
| 刘思思 |
湘潭大学 机械工程学院, 湘潭 |
| 张朝辉 |
北京交通大学 机械与电子控制工程学院, 北京 |
| 周杰 |
北京交通大学 机械与电子控制工程学院, 北京 |
| 何建国 |
北京交通大学 机械与电子控制工程学院, 北京 |
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| Abstract: |
| In micro/nanoscale devices, liquid meniscus is formed between solid surfaces, when they are brought into contact or at a small separation.The meniscus force and viscous force, inducing by the liquid meniscus, are the substantial causes leading to the precision decrease and the failure of devices.A physical model of micro/nanoscale sphere-on-flat surface was put forward here.Based on the Young-Laplace equation and Reynolds lubrication theory, the meniscus force and viscous force formulae were deduced.During the separation of the sphere and flat surfaces, the variations of meniscus shapes were illustrated.The effects of separation distance, initial meniscus height, surface wettability and separation time on meniscus and viscous force during the separation of the contact surfaces were analyzed.The results provide a basis for analyzing the micro/nanoscale surface anti-sticking mechanism. |
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