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Detection sensitivity analysis for piezoelectric mass sensor |
Received:April 07, 2011 Revised:September 11, 2011 |
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DOI:10.7511/jslx20125023 |
KeyWord:Piezoelectric sensor sensitivity analysis adsorbed mass resonance mode |
Author | Institution |
林哲祺 |
大连理工大学 工程力学系 工业装备结构分析国家重点实验室, 大连 |
刘书田 |
大连理工大学 工程力学系 工业装备结构分析国家重点实验室, 大连 |
郭绍伟 |
大连理工大学 工程力学系 工业装备结构分析国家重点实验室, 大连 |
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Abstract: |
A piezoelectric sensor for mass detection is a new type of sensor using piezoelectric materials as transverse transducer.A piezoelectric sensor’s resonance frequency shift is measured to quantify the small mass attached to the surface.Since the adsorbed mass is very small,the testing accuracy of the piezoelectric sensor is strongly depended on the mass detection sensitivity which is defined as the resonance frequency shift with respect to a loaded mass.This paper presents an investigation into the derivation of the relationship between the mass detection sensitivity and the structural configuration parameters.The dependence of mass detection sensitivity on structural configuration parameters and resonance modes is examined through numerical examples. |