| 刘思思,张朝辉,周杰,何建国.微/纳器件粗糙表面间弯月面力及黏着力计算[J].计算力学学报,2014,31(4):532~536 |
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| 微/纳器件粗糙表面间弯月面力及黏着力计算 |
| Meniscus and viscous forces between rough contact surfaces in micro/nano-devices |
| 投稿时间：2013-03-14 修订日期：2014-04-10 |
| DOI：10.7511/jslx201404019 |
| 中文关键词: 微/纳器件 粗糙表面接触模型 弯月面力 黏着力 |
| 英文关键词:micro/nano-element rough surface contact model meniscus force viscous force |
| 基金项目:湘潭大学博士启动基金（14QDZ04）资助项目. |
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| 中文摘要: |
| 微/纳器件表面微观粗糙结构间由于液体介质而引起的弯月面力和黏着力是导致器件精度降低乃至失效的主要原因之一。通过建立微/纳米尺度上球面-平面接触的物理模型，基于Young-Laplace方程和Reynolds润滑理论，分析得到粗糙表面接触分离过程中弯月面力和黏着力的计算公式。在此基础上，计算得到接触表面分离过程中的弯月面形状变化规律，并分别讨论了固体表面分离距离、液滴初始弯月面高度、固体表面润湿性能和分离时间等因素对弯月面力和黏着力的影响。研究结果为微/纳米表面抗黏着机理提供了理论依据。 |
| 英文摘要: |
| In micro/nanoscale devices, liquid meniscus is formed between solid surfaces, when they are brought into contact or at a small separation.The meniscus force and viscous force, inducing by the liquid meniscus, are the substantial causes leading to the precision decrease and the failure of devices.A physical model of micro/nanoscale sphere-on-flat surface was put forward here.Based on the Young-Laplace equation and Reynolds lubrication theory, the meniscus force and viscous force formulae were deduced.During the separation of the sphere and flat surfaces, the variations of meniscus shapes were illustrated.The effects of separation distance, initial meniscus height, surface wettability and separation time on meniscus and viscous force during the separation of the contact surfaces were analyzed.The results provide a basis for analyzing the micro/nanoscale surface anti-sticking mechanism. |
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