| 杨小斌,周又和.蠕动爬行微电机械力－电耦合的致动特性分析[J].计算力学学报,2003,20(5):518~522 |
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| 蠕动爬行微电机械力－电耦合的致动特性分析 |
| Analysis on the driving characteristic of a shuffle MEMS |
| 修订日期：2002-01-17 |
| DOI：10.7511/jslx20035099 |
| 中文关键词: 蠕动爬行微电机械 力-电耦合 致动特性 微电子加工 变形特征 |
| 英文关键词:MEMS,shuffling,the coupled mechanics electricity,nonlinear bending,the driving characteristic |
| 基金项目:国家杰出青年科学基金，科技部基础研究重大项目前期预研专项，教育部高校骨干教师基金，教育部高校博士点专项基金资助项目 |
| 杨小斌 周又和 |
兰州大学力学系 甘肃兰州730000
(杨小斌)
，兰州大学力学系 甘肃兰州730000(周又和)
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| 中文摘要: |
| 对于以施加电场作为驱动的蠕动爬行微电机构，在柔韧薄板理论和电学物理基础上，通过考虑驱动元件在电场力作用下的几何非线性变形和与结构变形相关的电荷分布及电场力分布，建立了其驱动元件的非线性耦合模型。在此基础上，采用矩量法和增量有限元法相结合，给出了其微电机构在失稳前由弯曲变形引起的蠕动距离随外加电压之间的特征关系。 |
| 英文摘要: |
| Based on thin plate and electrical theories, this paper establishes a nonlinear coupling model of the element that is actuated by the electrical field in the shuffling MEMS, to which the geometrical nonlinear deformation, electric charge and electric field force distribution with relation to the deformation are taken into account. On account of above theories, adopted the method of moment combining with the incremented finite element method and gives the characteristic relation between the shuffling displacement and controlling voltage by the bending deformation before the instability. |
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